标准编号：ISO 14644-12:2018
中文名称：清洁室及相关受控环境 第12部分：用纳米颗粒浓度监测空气清洁度的规范
英文名称：Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
发布日期：2018-08
标准范围
This document covers the monitoring of air cleanliness by particles in terms of concentration of
airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm)
or less – “nanoscale” – are considered.
The monitoring given in this document is for use mainly in “operational” states.
NOTE 1 For the purposes of this document, reference is made to “nanoscale particles”, which means all nano-
objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle
concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment,
personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
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