标准编号：ISO 14644-6:2007
中文名称：清洁室及相关受控环境 第6部分：词汇
英文名称：Cleanrooms and associated controlled environments — Part 6: Vocabulary
发布日期：2007-07
标准范围
This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644.It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.
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