ISO 24477:2022 真空技术 真空计 旋转转子压力计的规范、校准和测量不确定度

标准编号：ISO 24477:2022

中文名称：真空技术 真空计 旋转转子压力计的规范、校准和测量不确定度

英文名称：Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges

发布日期：2022-08

标准范围

This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.

标准预览图