标准编号：ISO 23216:2021
中文名称：碳基薄膜 用椭偏光谱法测定非晶碳薄膜的光学特性
英文名称：Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
发布日期：2021-05
标准范围
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
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