标准编号：ISO 19668:2017
中文名称：表面化学分析 X射线光电子能谱 均匀材料中元素检测极限的评估和报告
英文名称：Surface chemical analysis — X-ray photoelectron spectroscopy — Estimating and reporting detection limits for elements in homogeneous materials
发布日期：2017-08
标准范围
This document specifies a procedure by which elemental detection limits in X-ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.
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