标准编号：ISO 14644-2:2015
中文名称：洁净室及相关受控环境 第2部分：用粒子浓度监测提供与空气洁净度相关的洁净室性能的证据
英文名称：Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
发布日期：2015-12
标准范围
This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or cleanzone performance related to air cleanliness by particle concentration, based upon parameters thatmeasure or affect airborne particle concentration.This part of ISO 14644 does not address condition monitoring of aspects such as vibration or generalmaintenance of the engineering systems. It does not provide for monitoring of particle populationsthat are outside the specified lower threshold particle-size range, 0,1 μm to 5 μm. Concentrations ofultrafine particles (particles smaller than 0,1μm) will be addressed in a separate standard.
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