标准编号：ISO 14606:2022
中文名称：表面化学分析 溅射深度型材 外层系统为参考材料的最佳优化
英文名称：Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials
发布日期：2022-11
标准范围
This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.
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