标准编号：ISO 13084:2011
中文名称：表面化学分析 二次离子质谱 飞行时间二次离子质谱用质量标度的校准
英文名称：Surface chemical analysis — Secondary-ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer
发布日期：2011-05
标准范围
This International Standard specifies a method to optimize the mass calibration accuracy in time-of-flight SIMS instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
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