标准编号：ISO 14644-9:2022
中文名称：清洁室及相关受控环境 第9部分：微粒浓度法进行表面清洁度分级
英文名称：Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
发布日期：2022-05
标准范围
This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.
This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm.
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