标准编号：ISO 18516:2019
中文名称：表面化学分析 以纳米到微米为范围的光束横向分辨率和锐度的测定
英文名称：Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
发布日期：2019-01
标准范围
This document describes methods for measuring lateral resolution and sharpness in imaging surface
chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical
composition of surfaces under defined settings of an instrument. It applies to scanning instruments,
where a finely focused beam is scanned over the sample in a preselected field of view, as well as to
full field imaging instruments, where the field of view is simultaneously imaged by a broad beam,
an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and
sharpness are
— the straight edge method;
— the narrow line method;
— the grating method.
This document applies to instruments and methods that provide information on layers with nanometre
thicknesses and to surfaces with nanometre-sized structures and individual nano-objects.
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