标准编号：ISO 25178-700:2022
中文名称：产品几何技术规范（GPS） 表面结构：区域 第700部分：区域地形测量仪器的校准、调整和验证
英文名称：Geometrical product specifications (GPS) — Surface texture: Areal — Part 700: Calibration, adjustment and verification of areal topography measuring instruments
发布日期：2022-12
标准范围
This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178-600. Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments. Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178-701. This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area- integrating methods for measuring surface topography.
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