标准编号：ISO 16129:2012
中文名称：表面化学分析 X射线光电子能谱术 X射线光电子能谱仪的日常性能评定程序
英文名称：Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
发布日期：2012-04
标准范围
This International Standard is designed to allow the user to assess, on a regular basis, several key parameters of an X-ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently. Aspects of instrument behaviour covered by this International Standard include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X-ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this International Standard. The standard is intended for use with commercial X-ray photoelectron spectrometers equipped with a monochromated Al Kα X-ray source or with an unmonochromated Al or Mg Kα X-ray source.
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