标准编号：ISO/TS 21383:2021
中文名称：微束分析 扫描电子显微镜 定量测量用扫描电子显微镜的鉴定
英文名称：Microbeam analysis — Scanning electron microscopy — Qualification of the scanning electron microscope for quantitative measurements
发布日期：2021-03
标准范围
This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.
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