标准编号：ISO 29301:2023
中文名称：微束分析 分析电子显微镜 通过使用带周期性结构的标准物质校准图像放大率的方法
英文名称：Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
发布日期：2023-10
标准范围
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
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