ISO 11938:2012 微光束分析 电子探针微量分析 使用波长色散光谱进行基本映射分析的方法

标准编号：ISO 11938:2012

中文名称：微光束分析 电子探针微量分析 使用波长色散光谱进行基本映射分析的方法

英文名称：Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

发布日期：2012-03

标准范围

This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is assessed. It describes five types of data processing: the raw X?ray intensity data method, the k?value method, the calibration method, the correlation method and the matrix correction method.

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