ISO 16531:2020 表面化学分析 深度剖面 在AES和XPS中用于深度剖面的离子束排列和相关的电流或电流密度测量方法

标准编号：ISO 16531:2020

中文名称：表面化学分析 深度剖面 在AES和XPS中用于深度剖面的离子束排列和相关的电流或电流密度测量方法

英文名称：Surface chemical analysis — Depth profiling — Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

发布日期：2020-10

标准范围

This document specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). These methods are of two types: one involves a Faraday cup to measure the ion current; the other involves imaging methods. The Faraday cup method also specifies the measurements of current density and current distributions in ion beams. The methods are applicable for ion guns with beams with a spot size less than or equal to 1 mm in diameter. The methods do not include depth resolution optimization.

标准预览图