标准编号：ISO 24688:2022
中文名称：低角度X射线法测定纳米多层膜的调制周期
英文名称：Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods
发布日期：2022-07
标准范围
This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).
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