ISO 22278:2020 精细陶瓷（高级陶瓷、高级工业陶瓷） 用平行x射线射线衍射法测定单晶薄膜（晶片）结晶质量的试验方法

标准编号：ISO 22278:2020

中文名称：精细陶瓷（高级陶瓷、高级工业陶瓷） 用平行x射线射线衍射法测定单晶薄膜（晶片）结晶质量的试验方法

英文名称：Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

发布日期：2020-08

标准范围

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

标准预览图