ISO 18114:2021 表面化学分析 二次离子质谱法 离子注入标准物质的相对灵敏度因子测定

标准编号：ISO 18114:2021

中文名称：表面化学分析 二次离子质谱法 离子注入标准物质的相对灵敏度因子测定

英文名称：Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

发布日期：2021-05

标准范围

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

标准预览图