标准编号：ISO 18516:2006
中文名称：表面化学分析 俄歇电子能谱学和X射线光电子能谱学 横向分辨率的测定
英文名称：Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution
发布日期：2006-11
标准范围
This International Standard describes three methods for measuring the lateral resolution achievable in Augerelectron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edgemethod is suitable for instruments where the lateral resolution is expected to be larger than 1 μm. The gridmethod is suitable if the lateral resolution is expected to be less than 1 μm but more than 20 nm. The goldislandmethod is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
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