标准编号：ISO 17973:2016
中文名称：表面化学分析 中分辨率螺旋电子光谱仪 元素分析用能量标度的校准
英文名称：Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
发布日期：2016-09
标准范围
This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
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