标准编号：ISO/TR 15969:2021
中文名称：表面化学分析 深度剖面 喷溅深度测定
英文名称：Surface chemical analysis — Depth profiling — Measurement of sputtered depth
发布日期：2021-03
标准范围
This document provides guidelines for measuring the sputtered depth in sputtered depth profiling.
The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.
标准预览图
立即下载标准文件