ISO 20146:2019 真空技术 真空压力表 电容膜片压力表的规范、校准和测量不确定度

标准编号：ISO 20146:2019

中文名称：真空技术 真空压力表 电容膜片压力表的规范、校准和测量不确定度

英文名称：Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

发布日期：2019-01

标准范围

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which 
parameters have to be given for CDGs, details their calibration procedure and describes which 
measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as 
reference standards.

标准预览图