ISO 14644-16:2019 清洁室及相关受控环境 第16部分：洁净室和隔离设备的能源效率

标准编号：ISO 14644-16:2019

中文名称：清洁室及相关受控环境 第16部分：洁净室和隔离设备的能源效率

英文名称：Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices

发布日期：2019-05

标准范围

This document gives guidance and recommendations for optimizing energy usage and maintaining 
energy efficiency in new and existing cleanrooms, clean zones and separative devices. It provides 
guidance for the design, construction, commissioning and operation of cleanrooms. 
This document covers all cleanroom-specific features and can be used in different areas to optimize 
energy use in electronic, aerospace, nuclear, pharmaceutical, hospital, medical device, food industries 
and other clean air applications. 
It also introduces the concept of benchmarking for the performance assessment and comparison of 
cleanroom energy efficiencies, while maintaining performance levels to ISO 14644 requirements .

标准预览图