标准编号：ISO 11952:2014
中文名称：表面化学分析 扫描探针显微镜 用扫描探针显微镜测定几何量：测量系统的校
英文名称：Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
发布日期：2014-05
标准范围
This International Standard specifies methods for characterizing and calibrating the scan axes ofscanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable tothose providing further calibrations and is not intended for general industry use, where a lower level ofcalibration might be required.This International Standard has the following objectives:— to increase the comparability of measurements of geometrical quantities made using scanningprobemicroscopes by traceability to the unit of length;— to define the minimum requirements for the calibration process and the conditions of acceptance;— to ascertain the instrument’s ability to be calibrated (assignment of a “calibrate-ability” category tothe instrument);— to define the scope of the calibration (conditions of measurement and environments, ranges ofmeasurement, temporal stability, transferability);— to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simplegeometrical quantities in measurements using a scanning-probe microscope;— to define the requirements for reporting results.
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