标准编号：ISO 13095:2014
中文名称：表面化学分析 过程-原子力显微镜检查 用于纳米结构测量AFM探针原位表征柄概要文件的程序
英文名称：Surface Chemical Analysis — Atomic force microscopy — Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
发布日期：2014-07
标准范围
This International Standard specifies two methods for characterizing the shape of an AFM probe tip,specifically the shank and approximate tip profiles. These methods project the profile of an AFM probetip onto a given plane, and the characteristics of the probe shank are also projected onto that planeunder defined operating conditions. The latter indicates the usefulness of a given probe for depthmeasurements in narrow trenches and similar profiles. This International Standard is applicable to theprobes with radii greater than 5u0, where u0 is the uncertainty of the width of the ridge structure in thereference sample used to characterize the probe.
立即下载标准文件