标准编号：ISO 13424:2013
中文名称：表面化学分析 X射线光电子能谱术 薄膜分析的结果报告
英文名称：Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
发布日期：2013-10
标准范围
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
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