标准编号:ISO 14644-18:2023
中文名称:洁净室及相关受控环境 第18部分:耗材适用性的评估
英文名称:Cleanrooms and associated controlled environments — Part 18: Assessment of suitability of consumables
发布日期:2023-10
标准范围
This document gives guidance for assessing personal and non-personal consumables for their appropriate use in cleanrooms, clean zones or controlled zones, based on product and process requirements, cleanliness attributes and functional performance properties. The cleanliness attributes addressed are particles or chemicals in air or on surfaces. Biocontamination (viable particles, microorganisms or pyrogens) is considered as a special property of consumables. Identification of associated risks are considered. This document complements cleanroom operation as outlined in ISO 14644-5.