标准编号：ISO 23420:2021
中文名称：微束分析 分析电子显微镜 电子能量损失谱分析用能量分辨率的测定方法
英文名称：Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis
发布日期：2021-04
标准范围
This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.
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