标准编号：ISO 14644-3:2019
中文名称：洁净室及相关受控环境 第3部分：试验方法
英文名称：Cleanrooms and associated controlled environments — Part 3: Test methods
发布日期：2019-08
标准范围
This document provides test methods in support of the operation for cleanrooms and clean zones to
meet air cleanliness classification, other cleanliness attributes and related controlled conditions.
Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional
airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest
and operational.
The test methods, recommended test apparatus and test procedures for determining performance
parameters are provided. Where the test method is affected by the type of cleanroom or clean zone,
alternative procedures are suggested.
For some of the tests, several different methods and apparatus are recommended to accommodate
different end-use considerations. Alternative methods not included in this document can be used by
agreement between customer and supplier. Alternative methods do not necessarily provide equivalent
measurements.
This document is not applicable to the measurement of products or of processes in cleanrooms, clean
zones or separative devices.
NOTE This document does not purport to address safety considerations associated with its use (for example,
when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.
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