ISO 14237:2010 表面化学分析 二次离子质谱 均掺物质法测定硅中硼的原子浓度

标准编号：ISO 14237:2010

中文名称：表面化学分析 二次离子质谱 均掺物质法测定硅中硼的原子浓度

英文名称：Surface chemical analysis — Secondary-ion mass spectrometry — Determination of boron atomic concentration in silicon using uniformly doped materials

发布日期：2010-07

标准范围

This International Standard specifies a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon using uniformly doped materials calibrated by a certified reference material implanted with boron. This method is applicable to uniformly doped boron in the concentration range from 1 × 1016 atoms/cm3 to 1 × 1020 atoms/cm3.

标准预览图