ISO/TS 22933:2022 表面化学分析 二次离子质谱法 SIMS中质量分辨率的测量方法

标准编号：ISO/TS 22933:2022

中文名称：表面化学分析 二次离子质谱法 SIMS中质量分辨率的测量方法

英文名称：Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

发布日期：2022-04

标准范围

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

标准预览图