标准编号:ISO 29262:2011

中文名称:微系统用生产设备 末端执行器和处理系统间的接口

英文名称:Production equipment for microsystems — Interface between end effector and handling system

发布日期:2011-03

标准范围

This International Standard specifies provisions for the interface between end effector and handling systemsin production equipment for microsystems. It specifies principal deviations, tolerances and designations formanually and automatically changeable end effectors. The aim is to specify the end effector interface in threelevels with an increasing degree of specification.

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