标准编号：ISO/TR 14999-3:2005
中文名称：光学和光子学-光学元素和光学系统的干涉测量方法 - 第3部分： 干涉测量试验装置和测量方法校准和确认
英文名称：Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements
发布日期：2005-03
标准范围
This part of ISO 14999 discusses sources of error and the separation of errors into symmetric andnon-symmetric parts. It also describes the reliance of measurements on the quality of a physical referencesurface and the development of test procedures capable of achieving absolute calibration.
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