标准编号：ISO 16700:2016
中文名称：微束分析 电子扫描显微镜-用于校准影像放大倍率的指南
英文名称：Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
发布日期：2016-08
标准范围
This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.
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