ISO 14606:2015 表面化学分析 溅射深度型材 外层系统为参考材料的最佳优化

标准编号：ISO 14606:2015

中文名称：表面化学分析 溅射深度型材 外层系统为参考材料的最佳优化

英文名称：Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials

发布日期：2015-12

标准范围

This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.

标准预览图