标准编号:ISO 14644-2:2000
中文名称:清洁室和相关控制环境-第二部分:与ISO 14644-1 相符的试验和监测规范
英文名称:Cleanrooms and associated controlled environments — Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
发布日期:2000-09
标准编号:ISO 14644-2:2000
中文名称:清洁室和相关控制环境-第二部分:与ISO 14644-1 相符的试验和监测规范
英文名称:Cleanrooms and associated controlled environments — Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
发布日期:2000-09