标准编号：ISO 11952:2019
中文名称：表面化学分析 扫描探针显微镜 用扫描探针显微镜测定几何量：测量系统的校
英文名称：Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
发布日期：2019-05
标准范围
This document specifies methods for characterizing and calibrating the scan axes of scanning-probe
microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those
providing further calibrations and is not intended for general industry use, where a lower level of
calibration might be required.
This document has the following objectives:
— to increase the comparability of measurements of geometrical quantities made using SPMs by
traceability to the unit of length;
— to define the minimum requirements for the calibration process and the conditions of acceptance;
— to ascertain the instrument's ability to be calibrated (assignment of a “calibrate-ability” category to
the instrument);
— to define the scope of the calibration (conditions of measurement and environments, ranges of
measurement, temporal stability, transferability);
— to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple
geometrical quantities in measurements using an SPM;
— to define the requirements for reporting results.
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