标准编号：ISO/TS 6737:2023
中文名称：真空技术 真空计 稳定电离真空计的特性
英文名称：Vacuum technology — Vacuum gauges — Characteristics for a stable ionisation vacuum gauge
发布日期：2023-11
标准范围
This document describes a special design of an ionisation vacuum gauge which has a well-defined ionising electron path length. [2] Due to the construction design, it leads to good measurement accuracy, long-term stability, as well as gauge independent and reproducible sensitivity for nitrogen and relative sensitivity factors [3][4] . It is designed for the measurement range of 10 -6Pa to 10 -2 Pa. This document describes only those dimensions and potentials of the gauge head which are relevant for the electron and ion trajectories. This document does not describe the electrical components necessary to operate the ionisation vacuum gauge in detail. The gauge head can be operated by voltage and power sources and ammeters commercially available, but also by a controller specially built for the purpose of the operation of this gauge head.
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