标准编号：ISO/TS 80004-8:2020
中文名称：纳米技术 词汇表 第8部分：纳米制造工艺
英文名称：Nanotechnologies — Vocabulary — Part 8: Nanomanufacturing processes
发布日期：2020-11
标准范围
This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed
processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within
the definitions. Depending on controllable conditions, such processes can result in material features at
the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or
metrology methods associated with nanomanufacturing that are beyond the scope of this document.
Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for
context and better understanding.
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