标准编号:ISO 24237:2005
中文名称:表面化学分析 X光光电子光谱学 强度标的再现性和恒定不变性
英文名称:Surface chemical analysis — X-ray photoelectron spectroscopy — Repeatability and constancy of intensity scale
发布日期:2005-06
标准范围
This International Standard specifies a method for evaluating the repeatability and constancy of the intensity scale of X-ray photoelectron spectrometers, for general analytical purposes, using unmonochromated Al or Mg X-rays or monochromated Al X-rays. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrument settings that may affect this constancy.