标准编号:ISO/TS 24597:2011

中文名称:微光束分析 扫描电子显微镜术 图像清晰度的评定方法

英文名称:Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness

发布日期:2011-06

标准范围

This Technical Specification specifies methods of evaluating the sharpness of digitized images generated by ascanning electron microscope (SEM) by means of a Fourier transform (FT) method, a contrast-to-gradient(CG) method and a derivative (DR) method.

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