ISO 18118:2024 表面化学分析 俄歇电子能谱和X射线光电子能谱 实验测定的相对灵敏度因子在均匀材料定量分析中的使用指南

标准编号：ISO 18118:2024

中文名称：表面化学分析 俄歇电子能谱和X射线光电子能谱 实验测定的相对灵敏度因子在均匀材料定量分析中的使用指南

英文名称：Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis

发布日期：2024-02

标准范围

This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.

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