ISO 21360-6:2023 真空技术 测量真空泵性能的标准方法 第6部分：低温真空泵

标准编号：ISO 21360-6:2023

中文名称：真空技术 测量真空泵性能的标准方法 第6部分：低温真空泵

英文名称：Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

发布日期：2023-12

标准范围

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

标准预览图