标准编号：ISO 22581:2021
中文名称：表面化学分析 来自x射线光电子能谱测量扫描的近实时信息 含碳化合物表面污染的识别和校正规则
英文名称：Surface chemical analysis — Near real-time information from the X-ray photoelectron spectroscopy survey scan — Rules for identification of, and correction for, surface contamination by carbon-containi
发布日期：2021-03
标准范围
This document is provided to assist in the surface analysis of thin films on materials which are not
thought to contain carbon compounds as intended components but for which a C1s peak is observed
in the survey spectrum. The films can be those generated on metals and alloys by aerobic or
electrochemical oxidation or be those deposited on inert substrates. The procedure described is not
suitable for discontinuous deposits of particles on a substrate. With this exception, a simple procedure
is provided for identifying the C1s signal from carbon-containing surface contamination. When the C1s
peak is identified as arising from an adventitious over-layer the composition derived from the survey
spectrum can be corrected for its influence. Recommended procedures are provided in the form of
simple Rules structured in the 'If – Then' format with the intention that the information they embody
might be utilised by automated procedures in data-systems. The rules provided utilize only information
retrieved from the XPS survey scan.
标准预览图
立即下载标准文件