标准编号:ISO 13067:2020

中文名称:微束分析 电子背散射衍射 平均粒度的测量

英文名称:Microbeam analysis — Electron backscatter diffraction — Measurement of average grain size

发布日期:2020-07

标准范围

This document describes procedures for measuring average grain size derived from a two-dimensional polished cross-section using electron backscatter diffraction (EBSD). This requires the measurement of orientation, misorientation and pattern quality factor as a function of position in the crystalline specimen . The measurements in this document are made on two dimensional sections. The reader should note carefully the definitions used (3.3) which draw a distinction between the measured sectional grain sizes, and the mean grain size which can be derived from them that relates to the three dimensional grain size.
NOTE 1 While conventional methods for grain size determination using optical microscopy are well-
established, EBSD methods offer a number of advantages over these techniques, including increased spatial resolution and quantitative description of the orientation of the grains.
NOTE 2 The method also lends itself to the measurement of the grain size of complex materials, for example those with a significant duplex content.
NOTE 3 The reader is warned to interpret the results with care when attempting to investigate specimens with high levels of deformation.

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