ISO 14644-8:2022 清洁室及相关受控环境 第8部分：按化学浓度（ACC）划分空气清洁度

标准编号：ISO 14644-8:2022

中文名称：清洁室及相关受控环境 第8部分：按化学浓度（ACC）划分空气清洁度

英文名称：Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)

发布日期：2022-06

标准范围

This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document  currently considers only concentrations of air chemical contaminants between 10⁰ g/m and 10¹²g/ m³ under cleanroom operational conditions.
This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.

标准预览图