标准编号：ISO 23131:2021
中文名称：椭偏测量 原理
英文名称：Ellipsometry — Principles
发布日期：2021-04
标准范围
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
标准预览图
立即下载标准文件