标准编号：ISO 18115-3:2022
中文名称：表面化学分析 词汇.第3部分：光学界面分析中使用的术语
英文名称：Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
发布日期：2022-06
标准范围
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
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