标准编号：ISO 14644-1:2015
中文名称：洁净室及相关受控环境 第1部分：用粒子浓度确定空气洁净度等级
英文名称：Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
发布日期：2015-12
标准范围
This part of ISO 14644 specifies the classification of air cleanliness in terms of concentration of airborneparticles in cleanrooms and clean zones; and separative devices as defined in ISO 14644-7.Only particle populations having cumulative distributions based on threshold (lower limit) particlesizes ranging from 0,1 μm to 5 μm are considered for classification purposes.The use of light scattering (discrete) airborne particle counters (LSAPC) is the basis for determinationof the concentration of airborne particles, equal to and greater than the specified sizes, at designatedsampling locations.This part of ISO 14644 does not provide for classification of particle populations that are outside thespecified lower threshold particle-size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles(particles smaller than 0,1 μm) will be addressed in a separate standard to specify air cleanlinessby nano-scale particles. An M descriptor (see Annex C) may be used to quantify populations ofmacroparticles (particles larger than 5 μm).This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, viable orother nature of airborne particles.
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